If you click each image, you will find more information of each equipment.

 

Film/coating deposition and etching equipment

 

   

MicroDyn Microwave plasma enhanced sputter        CVC RF Magnetron sputter             Sub-One Hollow Cathode PECVD

 

         

Satis E-beam evaporator       Nordiko DC/RF Sputter      Plasma Coat RF Sputter

 

 

      

            RIE/PECVD                     Plasmalab PECVD

 

Microstructure analysis tools

Siemens X-ray diffraction    Hitachi SEM        AFM/Nanoindentation        Optical Microscopy

 

 

Physical and optical measurement facilities

 

    

Aquila Spectrophotometer    Veeco Thickness Mapper       Laser Vibrometer               Ellipsometer

     

High vacuum Kelvin Probe   Ambient Kelvin Probe                   Contact angle       UV-VS-IR spectrometer Surface Tension

 

Smart Probe  

          Langmuir Probe                     Tuneable laser photometer                      Voltalab 40 Potentiostat

 

Mechanical Measurement

 

             

Wear tester                         Impact tester                       Adhesion tester     

 

Electrical and Mechanical measurement facilities

 

     

Electrical Probe station        Network analyzer                  Impedance Analyzer               Four point probe station

 

Keithley 2400.jpg

Function generator               Power meter                          Keithley Power source         Power amplifier

 

 

General lab facilities

      

     

High-T Furnace   High-T Furnace  Laser wafer cutter      Spin coater        Helium Detector